Ph.D. graduate student
Berkeley Sensors & Actuator Center (BSAC)
University of California at Berkeley
Berkeley, CA
Berkeley Sensors & Actuator Center (BSAC)
University of California at Berkeley
Berkeley, CA
Dual axis micromachined vibratory gyro with integrated BiCMOS electronics
My PhD thesis was the design and analysis of a micromachined two-axis vibratory angular rate gyro with integrated sense and feedback electronics. This was manufactured by Analog Devices. This work was funded by Darpa.
BEM-o-matic
I was trained in the Ansys commercial FEM tools and was frustrated by the time needed to create valid 3D models. I postulated that it should be possible to automate both model generation and analyses using boundary elements. Boundary elements are ideal for large volume and small area models (e.g. exterior electrostatics) but poor for small volume and large area models (e.g. interior elastostatics). However I thought that automating everything would be ideal.
I created an automated tool in Matlab to analyze coupled electrostatic-elastostatic fields in simple MEMS structures. First a 3D model was created from the 2D masks. Next material properties and boundary conditions were specified. Next the electrostatic fields were solved, and the resulting electrostatic forces applied as the elastostatic BC. Next the elastostatic fields were solved, and the resulting deformations applied to the model. Finally the electrostatic and elastostatic analyses were iterated (relaxation) until convergence.
I created an automated tool in Matlab to analyze coupled electrostatic-elastostatic fields in simple MEMS structures. First a 3D model was created from the 2D masks. Next material properties and boundary conditions were specified. Next the electrostatic fields were solved, and the resulting electrostatic forces applied as the elastostatic BC. Next the elastostatic fields were solved, and the resulting deformations applied to the model. Finally the electrostatic and elastostatic analyses were iterated (relaxation) until convergence.